OPTIMIZATION-BASED SYNTHESIS OF MICRORESONATORS

The rapid layout synthesis of microresonators from high-level engineer ing specifications is demonstrated. Functional parameters such as reso nant frequency, quality factor, and displacement amplitude at resonanc e are satisfied while simultaneously minimizing a user-specified objec tive function. A synthesis tool implementing the optimization-based fo rmulation can be used to explore micromechanical design issues and obj ectives, as illustrated with a polysilicon lateral resonator example m odeled in three mechanical degrees of freedom. Layouts for four sets o f five different resonators from 3 kHz to 300 kHz are generated, with each set globally optimized to minimize either active device area, ele ctrostatic drive voltage, a weighted combination of area and drive vol tage, or to maximize displacement amplitude at resonance. (C) 1998 Els evier Science S.A. All rights reserved.