MODELING, DESIGN AND TESTING OF THE ELECTROSTATIC SHUFFLE MOTOR

Authors
TAS N WISSINK J SANDER L LAMMERINK T ELWENSPOEK M
Citation
N. Tas et al., MODELING, DESIGN AND TESTING OF THE ELECTROSTATIC SHUFFLE MOTOR, Sensors and actuators. A, Physical, 70(1-2), 1998, pp. 171-178
Citations number
11
Categorie Soggetti
Engineering, Eletrical & Electronic","Instument & Instrumentation
Journal title
Sensors and actuators. A, Physical → ACNP
ISSN journal
09244247
Volume
70
Issue
1-2
Year of publication
1998
Pages
171 - 178
Database
ISI
SICI code
0924-4247(1998)70:1-2<171:MDATOT>2.0.ZU;2-O
Abstract
The shuffle motor is a linear electrostatic stepper motor employing a mechanical transformation to obtain large forces and small steps. A mo del has been made to calculate the step size and the driving voltage a s a function of the load force and the motor geometry. The motor consi sts of three polysilicon layers and has been fabricated using surface micromachining. Tests show an effective step size of about 85 nm and a produced force of 43 mu N at 40 V driving voltage. (C) 1998 Elsevier Science S.A. All rights reserved.