HIGHLY REGULAR SELF-ORGANIZATION OF STEP BUNCHES DURING GROWTH OF SIGE ON SI(113)

Authors
DARHUBER AA ZHU J HOLY V STANGL J MIKULIK P BRUNNER K ABSTREITER G BAUER G
Citation
Aa. Darhuber et al., HIGHLY REGULAR SELF-ORGANIZATION OF STEP BUNCHES DURING GROWTH OF SIGE ON SI(113), Applied physics letters, 73(11), 1998, pp. 1535-1537
Citations number
10
Categorie Soggetti
Physics, Applied
Journal title
Applied physics letters → ACNP
ISSN journal
00036951
Volume
73
Issue
11
Year of publication
1998
Pages
1535 - 1537
Database
ISI
SICI code
0003-6951(1998)73:11<1535:HRSOSB>2.0.ZU;2-B
Abstract
We have studied the structural properties of highly periodic arrays of terrace steps in a Si/SiGe multilayer grown on a miscut Si(113) subst rate by atomic force microscopy, x-ray reflection and high resolution x-ray diffraction. The data reveal a regular array of step bunches wit h vertical correlation within the multilayer and periodic surface step s extending over lengths of several tens of microns. The (113)-faceted terraces have a lateral period of about 360 nm which is locally modul ated due to a long-range waviness of the surface. (C) 1998 American In stitute of Physics.