A fast pulsed capillary discharge device has been developed and implem
ented. The device combines the features of a transient hollow cathode
discharge with the inherent characteristics of the capillary discharge
, to obtain VUV to XUV radiation with ns rise time. The discharge oper
ates in a 0.8 mm inner diameter alumina capillary, at 10-30 kV applied
voltage. On axis discharge initiation is assisted by electron beams,
which are characteristic of the hollow cathode effect. A short, 5 ns f
ull width at half maximum XUV pulse is produced in association with a
similar to 1 kA, 5 ns current pulse. (C) 1998 American Institute of Ph
ysics. [S0034-6748(98)01709-2]