EFFECT OF THE COMPRESSIVE STRESS FOR THE GROWTH OF CUBIC-BN FILM

In this work, it is found that the compressive stress on the surface o f cubic-BN (c-BN) film is all smaller than that inside c-BN film and a fter a longer period, the depositing matter mainly is of hexagonal-BN phase rather than c-BN phase, those just are the reason why a pure thi cker c-BN film cannot, as yet, be obtained. Up to now the lowest IR pe ak position of 1004.7 cm(-1) detected from a broken and part delaminat ed c-BN film may be one close to the stressless c-BN.