10 GHZ RANGE LOW-LOSS LADDER TYPE SURFACE-ACOUSTIC-WAVE FILTER

A low-loss 10 GHz range surface acoustic wave (SAW) filter is investig ated. It is fabricated on 128 degrees Y-X LiNbO3 using the electron be am direct writing and lift-off process. The Al electrode with a width of 95 nm and a thickness of 30 nm is obtained successfully. In order t o simulate the characteristics of a ladder type filter with an equival ent circuit model, the parameters of an equivalent circuit model for a thick Al film in the 5 GHz range (thickness is 0.08 lambda, lambda = 0.75 mu m, lambda is the wavelength of SAW) is determined experimental ly. The experimental results of the ladder type filter in the 10 GHz r ange show low loss characteristics. The minimum insertion loss of 3.7 dB is obtained.