INTERFEROMETER DISTANCE MEASUREMENT SYSTEM USING A LINEAR DETECTOR ARRAY

Authors
XU YX LI QX XUE SF WANG J HUANG DX ZHANG LQ
Citation
Yx. Xu et al., INTERFEROMETER DISTANCE MEASUREMENT SYSTEM USING A LINEAR DETECTOR ARRAY, Optical engineering, 37(8), 1998, pp. 2269-2271
Citations number
4
Categorie Soggetti
Optics
Journal title
Optical engineering → ACNP
ISSN journal
00913286
Volume
37
Issue
8
Year of publication
1998
Pages
2269 - 2271
Database
ISI
SICI code
0091-3286(1998)37:8<2269:IDMSUA>2.0.ZU;2-H
Abstract
The principle and structure of a new self-scanning laser interferomete r are introduced. The output of a self-scanning photodiode array is mo dulated to generate an ac measurement signal, thereby avoiding de drif t and low-frequency disturbances. Experiments show that the device can be used in the range of 100 mm and with a resolution of less than 0.0 2 mu m. (C) 1998 Society of Photo-Optical instrumentation Engineers.