MICROMIRROR FABRICATION USING DYE-DOPED PLASTIC

Authors
CALIXTO S MALACARA Z
Citation
S. Calixto et Z. Malacara, MICROMIRROR FABRICATION USING DYE-DOPED PLASTIC, Optical engineering, 37(8), 1998, pp. 2320-2323
Citations number
8
Categorie Soggetti
Optics
Journal title
Optical engineering → ACNP
ISSN journal
00913286
Volume
37
Issue
8
Year of publication
1998
Pages
2320 - 2323
Database
ISI
SICI code
0091-3286(1998)37:8<2320:MFUDP>2.0.ZU;2-N
Abstract
It is shown that micromirrors can be made by ablating a dyed plastic u sing visible light. To test the optical quality of the micromirrors, m ethods such as the Ronchi and Foucault tests are applied. A commercial interferometer is also used to find their aberrations. (C) 1998 Socie ty of Photo-Optical Instrumentation Engineers.