INVESTIGATIONS INTO THE UNCERTAINTIES OF INTERFEROMETRIC MEASUREMENTSOF LINEAR AND CIRCULAR VIBRATIONS

A uniform description is given of a method of measurement using a Mich elson interferometer for measuring the linear motion quantities accele ration, velocity and displacement, and a diffraction grating interfero meter for measuring the circular motion quantities angular acceleratio n, angular velocity and rotation angle, The paper focusses on an analy sis of the dynamic behaviour of an interferometric measurement system based on the counting technique with regard to the measurement errors due to deterministic and stochastic disturbing quantities. The error a nalysis and description presented are aimed at giving some rules, math ematical expressions and graphical presentations that have proved to b e helpful in recognizing the errors in interferometric measurements of motion quantities, optimizing the measurement conditions (e.g., filte r settings), obtaining corrections and estimating the uncertainty of m easurement.