CHARACTERIZATION OF RANDOM ROUGH SURFACES BY INPLANE LIGHT-SCATTERING

The reciprocal space structures of Si backside rough surfaces were stu died using an in-plane light scattering technique. A diode array detec tor was used to collect the angular distribution of the scattered inte nsity. The diffraction profiles are interpreted based on the theory of diffraction from a self-affine rough surface. Roughness parameters su ch as interface width, lateral correlation length, and the roughness e xponent, are extracted from the profiles and are compared to that obta ined by real space imaging techniques such as atomic force microscopy and stylus profilometry. Factors that limit the accuracy of light scat tering measurements are discussed. (C) 1998 American Institute of Phys ics. [S0021-8979(98)08817-3].