We present here investigations of the initial steps in the formation o
f ultrathin carbon films on a carbon highly oriented pyrolytic graphit
e substrate by the deposition of low energy carbon ions at temperature
s from ambient to 300 degrees C. We used an ultrahigh vacuum scanning
tunneling microscopy to observe the growth of these films. At a nanome
ter scale, we revealed a roughening transition of the island's growth,
from lateral to tridimensional growth. Also, here we introduce the sc
aling analysis of roughness to describe the evolution of the morpholog
y of the interface during growth. The ultrathin film formation mechani
sms are studied as a function of ion density and annealing. (C) 1998 A
merican Institute of Physics. [S0021-8979(98)01416-9].