HYBRID MACHINE LEARNING-SYSTEM FOR INTEGRATED YIELD MANAGEMENT IN SEMICONDUCTOR MANUFACTURING

Yield is one of the most important indices determining the success in semiconductor manufacturing business. Previous yield management effort s are to enhance yield of the specific process through the use of stat istical and experimental analysis, but they fail to manage the yields of overall manufacturing processes. This research provides a framework for implementing such an integrated yield management system, which us es inductive decision trees and neural networks with a back propagatio n algorithm and a self-organizing mapping algorithm to manage yields o ver major manufacturing processes. (C) 1998 Elsevier Science Ltd. All rights reserved.