DEEP LEVELS IN N-TYPE SI SUBSTRATES TREATED IN O-2 PLASMA

Authors
SIMEONOV SS SZEKERES A KAFEDJIISKA E
Citation
Ss. Simeonov et al., DEEP LEVELS IN N-TYPE SI SUBSTRATES TREATED IN O-2 PLASMA, Physica status solidi. a, Applied research, 140(1), 1993, pp. 25-29
Citations number
7
Categorie Soggetti
Physics, Condensed Matter
Journal title
Physica status solidi. a, Applied research → ACNP
ISSN journal
00318965
Volume
140
Issue
1
Year of publication
1993
Pages
25 - 29
Database
ISI
SICI code
0031-8965(1993)140:1<25:DLINSS>2.0.ZU;2-R