B. Gordiets et al., SELF-CONSISTENT KINETIC-MODEL OF LOW-PRESSURE N-2-H-2 FLOWING DISCHARGES - II - SURFACE PROCESSES AND DENSITITES OF N, H, NH3 SPECIES, Plasma sources science & technology, 7(3), 1998, pp. 379-388
This work is the second of two companion papers devoted to the kinetic
modelling of low-pressure DG flowing discharges in N-2-H-2 mixtures.
White the first paper was mainly concerned with bulk discharge process
es, the present one investigates surface processes involving dissociat
ed N and H atoms, which are essential to understand the discharge prop
erties. The kinetic model for surface processes developed here takes i
nto account: (a) physical adsorption and desorption of N and H atoms;
(b) chemical adsorption and desorption of both types of atoms at vacan
t chemically active sites on the surface; (c) surface diffusion of phy
sisorbed N-f and H-f atoms; (d) the reactions of chemisorbed N-s and H
-s atoms with gas phase N and H atoms and with physisorbed N-f and H-f
atoms, leading to the formation of gas phase N-2, H-2 and chemisorbed
(NH)(s) molecules. The latter molecules can either be desorbed or rea
ct with H, H-s, H-2 to produce gas phase NH, NH2 and NH3 molecules. Th
e probability of wall losses for N, H, NH, NH2 and the rates for wall
production of NH, NH2, NH3 have been obtained for Pyrex glass as a fun
ction of the wall temperature and the relative concentrations of N, H,
NH, NH2, H-2. A number of important parameters for surface processes
have been estimated from detailed analysis of experimental data. Measu
rements of relative changes in N, H and NH3 concentrations in N-2-H-2
discharges as a function of the H-2 percentage have been interpreted i
n terms of the model.