NEUTRAL PUMPING IN A HELICON DISCHARGE

Citation
J. Gilland et al., NEUTRAL PUMPING IN A HELICON DISCHARGE, Plasma sources science & technology, 7(3), 1998, pp. 416-422
Citations number
16
Categorie Soggetti
Phsycs, Fluid & Plasmas
ISSN journal
09630252
Volume
7
Issue
3
Year of publication
1998
Pages
416 - 422
Database
ISI
SICI code
0963-0252(1998)7:3<416:NPIAHD>2.0.ZU;2-7
Abstract
At powers of 500-800 W of 13.56 MHz rf power in a 1 kG axial magnetic field, the neutral pressure in the bulk of a helicon discharge with el ectron densities of similar to 10(13) cm(-3) and electron temperatures of similar to 3 eV in argon decreased by a factor of ten compared to the pressure before the discharge. These experimental results are comp ared with a simple axial diffusion model of ionization and neutral tra nsport and agree qualitatively with calculated axial profiles of neutr al pressure. The effects of cusped fields on neutral density profiles and plasma confinement are also examined.