A 3-INTENSITY TECHNIQUE FOR POLARIZER-SAMPLE-ANALYZER PHOTOMETRIC ELLIPSOMETRY AND POLARIMETRY

This work presents a novel three-intensity-measurement technique to de termine the ellipsometric parameters psi and Delta in a polarizer-samp le-analyser photometric ellipsometer. This technique can be employed t o correct the azimuthal misalignment of the analyser with respect to t he plane of incidence. By performing two sets of measurements with thi s technique with the polarizer's azimuth at +45 degrees and -45 degree s, respectively, we can simultaneously determine the azimuthal deviati on of the polarizer and further improve the ellipsometric measurements . Applying this technique in the transmission mode allows us to obtain the phase retardation and the optical axis of a waveplate at the same time.