The development of third-generation synchrotron sources has stimulated
efforts toward high-resolution monochromators. A good knowledge of gr
ating efficiency is needed to achieve an optimal, compromise between r
esolution and photon flux. Because simple geometric models fail to des
cribe correctly the gratings properties in the UV-to-soft-X-ray range,
we have developed a simulation software based on differential theory.
A simplified R-matrix propagation algorithm assures the numerical sta
bility of the code for deep gratings. Our numerical results are compar
ed with previous research on deep gratings. Experimental and numerical
studies have been performed on some test cases at a synchrotron sourc
e. Very good agreement between numerical prediction and measurement ha
s been found. (C) 1998 Optical Society of America.