STANDARDS FOR WHICH THE ELLIPSOMETRIC PARAMETER PSI REMAINS INSENSITIVE TO VARIATIONS IN THE ANGLE OF INCIDENCE

We examine the possibility of using two-and three-phase systems suitab le as standards for which the ellipsometric parameter Psi remains inse nsitive to variations in the angle of incidence. These standards avoid propagation of errors in the angle of incidence with respect to the m easured standard Psi r value. Different materials (dielectrics, metals , and semiconductors), adequate for the above purpose, are considered in different structure combinations, and their optical response are an alyzed. (C) 1998 Optical Society of America.