CARBON TITANIUM MULTILAYERS AS SOFT-X-RAY MIRRORS FOR THE WATER WINDOW/

C/Ti multilayers with a period thickness of 2.1-2.7 nm were produced b y electron-beam evaporation in ultrahigh vacuum as soft-x-ray mirrors in the water window (lambda = 2.3-4.4 nm). For smoothing the individua l interfaces and thus enhancing the total reflectance, each layer was ion polished with an Art ion beam after deposition. For a multilayer o f 85 bilayers, a reflectance of approximately 11% at an angle of incid ence of 59 degrees (with respect to the surface normal) by use of s-po larized radiation at a wavelength of 2.77 nm was achieved. (C) 1998 Op tical Society of America.