A CHEMICAL MICRO-ANALYSIS SYSTEM FOR THE MEASUREMENT OF PRESSURE, FLOW-RATE, TEMPERATURE, CONDUCTIVITY, UV-ABSORPTION AND FLUORESCENCE

Authors
NORLIN P OHMAN O EKSTROM B FORSSEN L
Citation
P. Norlin et al., A CHEMICAL MICRO-ANALYSIS SYSTEM FOR THE MEASUREMENT OF PRESSURE, FLOW-RATE, TEMPERATURE, CONDUCTIVITY, UV-ABSORPTION AND FLUORESCENCE, Sensors and actuators. B, Chemical, 49(1-2), 1998, pp. 34-39
Citations number
9
Categorie Soggetti
Electrochemistry,"Chemistry Analytical","Instument & Instrumentation
Journal title
Sensors and actuators. B, Chemical → ACNP
ISSN journal
09254005
Volume
49
Issue
1-2
Year of publication
1998
Pages
34 - 39
Database
ISI
SICI code
0925-4005(1998)49:1-2<34:ACMSFT>2.0.ZU;2-4
Abstract
A miniaturized multisensor system, intended for the simultaneous measu rement of six different parameters in a liquid flow, is presented. The system combines a multisensor chip, a micromachined flow-through cell and optical fiber interfaces to monitor pressure, flow rate, temperat ure, conductivity, W-absorption and fluorescence. The design and fabri cation process for the sensor and flow-cell chips are described as wel l as the design of the packaging and the optical, electrical and liqui d interfaces. Measurement results show that the performance of the sys tem can compete with that of conventional stand-alone sensors. (C) 199 8 Elsevier Science S.A. All rights reserved.