NANOSCALED INTERDIGITATED ELECTRODE ARRAYS FOR BIOCHEMICAL SENSORS

Nanoscaled interdigitated electrode arrays were made with deep UV lith ography. Electrode widths and spacings from 500 down to 250 nm were ac hieved on large active areas (0.5 x 1 mm). These electrodes allow for the detection of affinity binding of biomolecular structures (e.g. ant igens, DNA) by impedimetric measurements. Such a sensor with Pd electr odes on SiO2 is developed and theoretically analysed. It was experimen tally characterised in KCl solutions demonstrating its bulk-insensitiv e behaviour and the immobilisation of glucose oxidase (GOD) could be m onitored by measuring the double layer impedance. (C) 1998 Elsevier Sc ience S.A. All rights reserved.