MAGNETIC-PROPERTIES OF NDFEB THIN-FILMS GROWN BY A PULSED-LASER DEPOSITION

High energy product Nd2Fe14B films were grown on Si(1 0 0) substrate b y KrF pulsed laser ablation using the targets of NdxFe90.98-xB9.02 (x =17.51-27.51). The films of Nd2Fe14B single phase did not exhibit a pr eferred orientation. However. [2 2 1], [0 0 6] and [2 2 2] axes were p rominent for the films grown at the substrate temperature above 680 de grees C by using the target of Nd27.51Fe63.47B9.02. This condition pro vided the superior magnetic properties along the out-of-plane directio n of films resulting in the magnetic properties of 4 pi M-s = 7 kG, 4 pi M-r = 4 kG, and H-c = 1000 Oe. The deposition rate was not much inf luenced by changing the substrate temperature (T-s), but it increased linearly by increasing the beam energy density. The beam density of 3 J/cm(2) gave the optimal condition to have the highest 4 pi M-r and H- c simultaneously. The higher content of Nd induced a higher coercivity and 4 pi M-r at the same time due to the finer grain size without pro minent change in 4 pi M-s. The films of x = 27.51 showed a grain size of less than 12 nm while that of x = 17.51 shelved a grain size of abo ut 15 nm. (C) 1998 Elsevier Science B.V. All rights reserved.