SPECIFIC FEATURES INDUCED BY THE VAPORIZATION OF SOLID ORGANOMETALLICCOMPOUNDS USED AS OMCVD PRECURSORS FOR DEPOSITION IN THE V-C-N CHEMICAL-SYSTEM

Authors
TEYSSANDIER F POIRIER L SLIFIRSKI J VALADE L DANJOY C REYNES A JAUBERTEAU JL SIBIEUDE F
Citation
F. Teyssandier et al., SPECIFIC FEATURES INDUCED BY THE VAPORIZATION OF SOLID ORGANOMETALLICCOMPOUNDS USED AS OMCVD PRECURSORS FOR DEPOSITION IN THE V-C-N CHEMICAL-SYSTEM, Annales de chimie, 23(5-6), 1998, pp. 655-666
Citations number
6
Categorie Soggetti
Chemistry,"Material Science
Journal title
Annales de chimie → ACNP
ISSN journal
01519107
Volume
23
Issue
5-6
Year of publication
1998
Pages
655 - 666
Database
ISI
SICI code
0151-9107(1998)23:5-6<655:SFIBTV>2.0.ZU;2-2
Abstract
The pyrolysis behaviours of titanocene dichloride and vanadocene used as a precursor for the chemical vapor deposition of titanium carbide a nd vanadium carbide, respectively, are studied. The influence of the g as-phase transport of these compounds on the properties of the deposit s is also discussed according to the vaporization procedure.