INNER SURFACE ION-IMPLANTATION USING DEFLECTING ELECTRIC-FIELD

Because of its non line-of-sight nature, researchers have recently foc used on plasma immersion ion implantation (PIII) to enhance the proper ties of inner surfaces of industrial components to combat wear and cor rosion. However, theoretical simulation has shown a relatively dim pro spect because of the limitation on impact energy and retained dose. In this paper, we describe a procedure to improve the efficiency of inne r surface implantation by using a symmetrical experimental setup and d eflecting electric field. Improvements of 43% and 71% are observed for the implantation depth and retained dose, respectively. Since a large portion of the ions implanted into the interior surface originate fro m outside of the bore, a longer pulse-width will be more beneficial. ( C) 1998 Elsevier Science B.V. All rights reserved.