Eo. Filatova et al., DEPTH OF FORMATION OF A REFLECTED SOFT-X-RAY BEAM UNDER CONDITIONS OFSPECULAR REFLECTION, Physics of the solid state, 40(7), 1998, pp. 1237-1240
Over a wide range of glancing-incidence angles, bremsstrahlung from an
x-ray tube was used to measure the reflection spectra of an Si-SiO2 s
ystem with different dioxide thickness near the Si L-2,L-3 ionization
threshold. The angular dependence of the depth of formation of the ref
lected soft x-ray beam was determined experimentally and compared with
that obtained from a theoretical analysis of the interaction between
electromagnetic radiation and the surface of an isotropic solid. (C) 1
998 American Institute of Physics.