EFFECT OF ANNEALING ON THE DIELECTRIC PERMITTIVITY OF STRONTIUM-TITANATE FILMS IN THE SRTIO3 AL2O3 STRUCTURE/

The paper reports an experimental study of the structure of a strontiu m titanate film on. a sapphire substrate and of the dielectric propert ies of capacitors based on a SrTiO3/Pt/Al2O3 multilayer system before and after a high-temperature anneal. The macro- and microstructure of SrTiO3 films and its variation induced by the annealing have been inve stigated. The temperature and field dependences of the dielectric perm ittivity of strontium titanate films have been determined, and their c omparison with similar data for single crystals carried out. The mecha nisms by which annealing can affect the capacitor capacitance and the properties of SrTiO3 films are discussed. (C) 1998 American Institute of Physics. [S1063-7834(98)01608-6].