TRANSPARENT CONDUCTING ZNO-AL FILMS DEPOSITED ON ORGANIC SUBSTRATES DEPOSITED BY R.F. MAGNETRON-SPUTTERING

Authors
YANG TL ZHANG DH MA J MA HL CHEN Y
Citation
Tl. Yang et al., TRANSPARENT CONDUCTING ZNO-AL FILMS DEPOSITED ON ORGANIC SUBSTRATES DEPOSITED BY R.F. MAGNETRON-SPUTTERING, Thin solid films, 326(1-2), 1998, pp. 60-62
Citations number
6
Categorie Soggetti
Physics, Applied","Material Science","Physics, Condensed Matter
Journal title
Thin solid films → ACNP
ISSN journal
00406090
Volume
326
Issue
1-2
Year of publication
1998
Pages
60 - 62
Database
ISI
SICI code
0040-6090(1998)326:1-2<60:TCZFDO>2.0.ZU;2-#
Abstract
Transparent conducting ZnO:Al films with good adhesion and low resisti vity have been prepared on organic substrales by r.f. magnetron-sputte ring. Polycrystalline ZnO:Al films having a preferred orientation were obtained with resistivity 1.84 x 10(-3) Omega cm, carrier concentrati on 4.62. x 10(20) cm(-3) and Hall mobility 7.34 cm(2)/v per s. The ave rage transmittance of the films is 84% in the wavelength range of the visible spectrum. (C) 1998 Elsevier Science S.A. All rights reserved.