SIMULATION AND ANALYSIS OF X-RAY PHOTOEMISSION AND AUGER VALENCE-BANDSPECTRA OF HYDROGENATED AMORPHOUS-SILICON

The X-ray photoemission (XPS) and Auger electron spectra (AES) of amor phous silicon have been simulated using the semi-empirical quantum mec hanical molecular modelling package, MOPAC. The calculated spectra com pare well with those obtained experimentally and provide a basis for t hr interpretation and analysis of the features in the experimental spe ctra. Changes in the spectra as a result of hydrogenation of the mater ial are also analysed. The results of this study illustrate how simula tion of XPS and AES spectra can be used to obtain semi-quantitative in formation about the hydrogen content and the type of Si-H bonding pres ent in amorphous silicon alloys. (C) 1998 Elsevier Science S.A, All ri ghts reserved.