THERMAL-OXIDATION UNDER OXYGEN OF ZIRCONIUM NITRIDE STUDIED BY XPS, DRIFTS, TG-MS

The studies of oxidation of nitrides or oxynitrides compounds are impo rtant since their electrical, thermal, catalytical and reactional prop erties are drastically modified by the oxidation layer encountered on top of these ceramics. In this paper we present the thermal oxidation of ZrN under O-2, in order to have a better understanding of the inter mediate species encountered during the reaction, in the frame of low t emperature nitridation of ceramics. The analysis of gas reaction produ cts during oxidation and the confrontation of XPS and DRIFTS results o n partially oxidized samples allow to evidence the formation of a stab le Zr-N-N-O-Zr intermediate. (C) 1998 Elsevier Science Limited. All ri ghts reserved.