The process of vacuum evaporation and condensation in the Ge-Se-Tl sys
tem is investigated. The kinetics of the processes are studied at evap
oration temperatures from 560 to 905 K and substrate temperatures from
290 to 400 K. The evaporation energy as function of the thallium cont
ent at a constant ratio Ge/Se is in the range from 126 to 157 kJ/mol.
The condensation energy is in the range from 5.99 to 7.03 kJ/mol. The
electron microscope investigation provides information about the morph
ology of the films. The film composition has been investigated by Auge
r electron spectroscopy.