SOL-GEL GLASS WAVE-GUIDE AND GRATING ON SILICON

This paper reports on the fabrication and characterization of hybrid o rganic-inorganic glass sol-gel slab and channel waveguides by ultravio let light imprinting in thin films deposited by a one-step dip-coating process. The adjustment of chemical composition of the materials prov ides precise selection of refractive index from 1.45 to 1.52 at the wa velength of 632.8 nm, The refractive index of the waveguides at 1.55 m u m is similar to that of optical fiber, thus reducing the reflection loss between the two to less than 0.01 dB, The effect of ultraviolet l ight exposure and heat treatment on waveguide refractive index is stud ied. Fabrication parameters to produce ridge waveguides are optimized to achieve very smooth side walls. Propagation losses in these wavegui des are similar to 0.1 dB/cm, Single mode buried waveguides, at 1.55 m u m wavelength, with circular mode profile are demonstrated.