DYNAMIC-MODEL OF CANTILEVERED CAPACITIVE ACCELEROMETERS IN AN INTEGRAL CONFIGURATION

Authors
KUDRYASHOV EA
Citation
Ea. Kudryashov, DYNAMIC-MODEL OF CANTILEVERED CAPACITIVE ACCELEROMETERS IN AN INTEGRAL CONFIGURATION, Measurement techniques, 41(1), 1998, pp. 45-52
Citations number
9
Categorie Soggetti
Instument & Instrumentation",Engineering
Journal title
Measurement techniques → ACNP
ISSN journal
05431972
Volume
41
Issue
1
Year of publication
1998
Pages
45 - 52
Database
ISI
SICI code
0543-1972(1998)41:1<45:DOCCAI>2.0.ZU;2-R
Abstract
A method is proposed for modeling the frequency characteristics of cap acitive accelerometers by using Green's function for a moving system. The model is used to calculate the dependences of the degree of accele ration (air damping) of moving systems of the cantilever type on sever al structural parameters (the width of the cantilever, the thickness o f the air gaps, etc.). Calculations are also performed to determine th e level and mode of the resonance vibrations of the system in air up t o 250 kHz.