FORMATION OF DISCONTINUOUS TRACKS IN SINGLE-CRYSTALLINE INP BY 250-MEV XE-ION IRRADIATION

Damage production was studied in 250-MeV Xe-ion irradiated single-crys talline InP by means of Rutherford backscattering spectrometry using a channeling technique and cross-section TEM. Different concentrations and types of defects are created at different depths of the trajectory due to the different dominating interaction processes. Depending on t he ion fluence the: formation of discontinuous tracks and amorphous la yers was registered in the depth region of high electronic energy loss of the incident ions. The observed findings are interpreted as the ef fect of a thermal spike in combination with damage accumulation result ing from imperfect epitaxial recrystallization of the molten ion track s.