Using scanning tunneling microscopy (STM), we have studied the formati
on and structure of the Si(100)2 x 3-Na surface phase. It has been fou
nd that both the formation process and atomic arrangement of the Sit 1
00)2 x 3-Na surface differ substantially from those known for 2 x 3 re
constructions induced by other alkali and alkaline earth metals, since
the Si(100)2x3-Na phase is the only one in which the top Si layer und
ergoes a substantial reordering. The Si-atom density in the Si(100)2x3
-Na surface phase has been determined to be 1/3 ML. A structural model
of the Si(100)2x3-Na reconstruction has been proposed, and its regist
ry to STM images has been discussed.