THE MECHANICAL-PROPERTIES OF DLC AND FLUORINATED DLC FILMS DEPOSITED USING UNBALANCED MAGNETRON SPUTTER ION PLATING METHOD

Authors
CHOY KL ZHAO JS
Citation
Kl. Choy et Js. Zhao, THE MECHANICAL-PROPERTIES OF DLC AND FLUORINATED DLC FILMS DEPOSITED USING UNBALANCED MAGNETRON SPUTTER ION PLATING METHOD, Scripta materialia, 39(7), 1998, pp. 839-845
Citations number
6
Categorie Soggetti
Material Science","Metallurgy & Metallurigical Engineering
Journal title
Scripta materialia → ACNP
ISSN journal
13596462
Volume
39
Issue
7
Year of publication
1998
Pages
839 - 845
Database
ISI
SICI code
1359-6462(1998)39:7<839:TMODAF>2.0.ZU;2-Q