LAMINATED DUAL-AXIAL ANISOTROPY FILM FOR SUBMICROMETER-TRACKWIDTH THIN-FILM HEADS

A dual-axial anisotropy film which consists of two uniaxial sandwiches of Co91Nb6Zr3/SiO2/Co91Nb6Zr3 with their easy axes orthogonally orien ted, was fabricated by RF-sputtering using a water-cooled, magnetic su bstrate holder, for application in a new type of submicron trackwidth thin film head. The thermal stability of the induced uniaxial anisotro py of the film was studied by heat treatment in a magnetic field and s ubsequent magnetic measurements, The magnetic properties of the films before and after rotational field annealing (RFA) were studied by thei r B-B loops and permeability spectrum along various directions in the film plane, It was found that the B-H loops of the as-deposited dual-a xial film along either axis were the superposition of the easy axis an d hard axis B-H loops of the two uniaxial sandwiches along that axis. The two uniaxial sandwiches appear to behave independently before RFA. In-plane isotropic B-H loops and isotropic permeability of 2640 at 10 MHz were obtained for the dual-axial films after RFA at 320 degrees C . The small H-k and the magneto-static interaction between the two san dwiches may be mainly responsible for the isotropic magnetic propertie s of the dual-axial film after RFA.