PROBLEMS OF THE HUMAN-BODY MODEL AND ELECTROSTATIC DISCHARGE PART 1 -DISCHARGE FROM LSIS HELD BY A CHARGED PERSON

The nanosecond transient response between a pin of a large-scale integ rated circuit (LSI) held by a charged person and the ground plane show ed a very sharp impulse and high peak current. This response could not be represented using the human body model (HBM), and it was caused by the parasitic capacity between an inner conductor in the LSI and the ground plane. However, the conventional HEM tester could not control t he low capacitance. Consequently, the machine model (MM) using a low c apacitance or the charged device model (CDM) with low device capacitan ce should be used. Moreover, the capacitanc of charged objects includi ng LSIs can be determined by a Coulomb meter. Practical use of these d ata will give us the methods to prevent electrostatic discharge troubl es for quarter-micron LSIs.