SPUTTERING AND MIXING IN SYSTEMS FILM-SUBSTRATE UNDER IMPACT OF THE POLY-ENERGY AR-BEAM WITH THE MEAN ENERGY OF 10 KEV( ION)

Authors
KALIN BA VOLKOV NV ATALIKOVA IK RYBALKO VF TOLSTOLUTSKAYA GD
Citation
Ba. Kalin et al., SPUTTERING AND MIXING IN SYSTEMS FILM-SUBSTRATE UNDER IMPACT OF THE POLY-ENERGY AR-BEAM WITH THE MEAN ENERGY OF 10 KEV( ION), Izvestia Akademii nauk SSSR. Seria fiziceskaa, 62(7), 1998, pp. 1477-1482
Citations number
7
Categorie Soggetti
Physics
Journal title
Izvestia Akademii nauk SSSR. Seria fiziceskaa → ACNP
ISSN journal
03676765
Volume
62
Issue
7
Year of publication
1998
Pages
1477 - 1482
Database
ISI
SICI code
0367-6765(1998)62:7<1477:SAMISF>2.0.ZU;2-Z