MICROSTRUCTURING OF SILICON WITH FEMTOSECOND LASER-PULSES

Authors
HER TH FINLAY RJ WU C DELIWALA S MAZUR E
Citation
Th. Her et al., MICROSTRUCTURING OF SILICON WITH FEMTOSECOND LASER-PULSES, Applied physics letters, 73(12), 1998, pp. 1673-1675
Citations number
18
Categorie Soggetti
Physics, Applied
Journal title
Applied physics letters → ACNP
ISSN journal
00036951
Volume
73
Issue
12
Year of publication
1998
Pages
1673 - 1675
Database
ISI
SICI code
0003-6951(1998)73:12<1673:MOSWFL>2.0.ZU;2-Y
Abstract
We report that silicon surfaces develop an array of sharp conical spik es when irradiated with 500 laser pulses of 100-fs duration, 10-kJ/m(2 ) fluence in 500-Torr SF6 or Cl-2. The spikes are up to 40-mu m tall, and taper to about 1-mu m diam at the tip. Irradiation of silicon surf aces in N-2. Ne, or vacuum creates structured surfaces, but does not c reate sharp conical spikes. (C) 1998 American Institute of Physics.