Ch. Chen et al., FABRICATION OF HIGH-TEMPERATURE SUPERCONDUCTING JOSEPHSON-JUNCTIONS ON SUBSTRATES PATTERNED BY FOCUSED ION-BEAM, Applied physics letters, 73(12), 1998, pp. 1730-1732
High aspect ratio trenches were patterned on (100) LaAlO3 substrates b
y focused ion-beam milling prior to film deposition. Subsequent YBCO f
ilms deposited by pulsed laser deposition were found to break naturall
y across these trenches. In situ Au was then deposited to connect the
separated YBCO electrodes. Junctions were then patterned across the tr
enches to form a superconductor/normal/superconductor configuration. T
he resistively shunted junctions exhibited supercurrents up to 86 K. U
nder microwave irradiation, the junctions exhibited a number of clear
Shapiro steps in the I-V characteristics. The transverse magnetic-fiel
d diffraction pattern indicted uniform current distribution across the
junction. (C) 1998 American Institute of Physics.