The quantitative characterization of the interface roughness of Fe/Cr
superlattices is necessary for the understanding of the transport prop
erties of such structures. This must include both vertical and lateral
roughness components. The information can be obtained by specular and
off-specular X-ray diffraction and conversion electron Mossbauer spec
troscopy. We show how models describing specular and diffuse X-ray dif
fraction can be applied to extract quantitative data. The robustness o
f such data can be further enhanced using anomalous scattering, leadin
g to an enhanced material contrast for Fe/Cr. Similarity and complemen
tarity of the X-ray diffraction results with the Mossbauer data are di
scussed. (C) 1998 Academic Press.