A STUDY OF PULSED-LASER DEPOSITION OF LIMN2O4 THIN-FILMS

The LiMn2O4 films have been prepared by 355 nm pulsed laser deposition on the heated stainless steel substrate in an O-2 gas environment. Th e formation of the ablated species in the laser ablation process and t he effect of O-2 ambient have been investigated by both quadrupole mas s spectrometry and optical emission spectroscopy. The measured mass sp ectra show that the main ablation products are Mn+, Li+, O-2, O, LiO2, LiMnO and lithium atomic cluster. The dependence of ambient O-2 press ure on the emission intensities of Mn containing species shows that th e reactions of the ablated species with oxygen play an important role in the film deposition. The deposited LiMn2O4 films are characterized by XRD and cyclic voltammetry.