DEPOSITION OF CARBON THIN-FILMS BY FREE-ELECTRON LASER

Authors
OKOSHI M HANABUSA M OKUMA S
Citation
M. Okoshi et al., DEPOSITION OF CARBON THIN-FILMS BY FREE-ELECTRON LASER, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 144(1-4), 1998, pp. 147-151
Citations number
10
Categorie Soggetti
Instument & Instrumentation","Nuclear Sciences & Tecnology","Physics, Atomic, Molecular & Chemical","Physics, Nuclear
Journal title
Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms → ACNP
ISSN journal
0168583X
Volume
144
Issue
1-4
Year of publication
1998
Pages
147 - 151
Database
ISI
SICI code
0168-583X(1998)144:1-4<147:DOCTBF>2.0.ZU;2-R
Abstract
We used free electron laser (FEL) to ablate graphite and frozen aceton e. FEL ablation of the graphite target produced fullerene (C-60)-like films on silicon substrate at room temperature. Acetone in the frozen target was decomposed by FEL if the wavelength was tuned to its infrar ed absorption band, as revealed by a mass spectrometer. The deposit ob tained on silicon from the frozen acetone target was transparent and s haped like glass piece or hat plate. (C) 1998 Elsevier Science B.V. Al l rights reserved.