S. Ogino et al., FREE-ELECTRON LASER (FEL) ANNEALING OF DIAMOND, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 144(1-4), 1998, pp. 181-185
Free Electron Laser (FEL) with wide wavelength tunability has been dev
eloped and used for various applications. We report the structural-cha
nges in P-ion-implanted diamond when we can achieve resonant excitatio
n of the vibrations of specific bonds in the lattice of target (P-C) b
y using FEL. The change of property was analyzed by SIMS and Raman spe
ctroscopy. After 5.8 mu m-FEL irradiation, we observed the crystalliza
tion of amorphous structure which was induced by P-ion-implantation. T
hese results indicated the FEL annealing of diamond at room temperatur
e. (C) 1998 Published by Elsevier Science B.V. All rights reserved.