Miniature fluid pumps, measuring 15 x 4 x 1 mm, have been microfabrica
ted with silicon, glass, and polyimide. Pumps have been tested with de
ionized water and 10% glycerol solutions as the working solutions. The
pumps have been operated with a pneumatic drive or a piezoelectric dr
ive. Flow rates from 0.1 to 110 mu l min(-1) have been achieved. The m
aximum pressure generated by the pumps was 56 cm of water. Pumps have
been operated with a dialysis probe and with a microchannel load. The
pump lifetime is limited by the degradation in the performance of the
polyimide components in the pump. The power consumption was less than
1 mW at a drive frequency of 10 Hz. (C) 1998 Elsevier Science Ltd. All
rights reserved.