MECHANICAL-PROPERTIES OF DLC FILMS PREPARED BY BIPOLAR PULSED DC PACVD

The most common method for the deposition of DLC films is radio freque ncy PACVD (rf, 13.56 MHz), which is technically difficult and expensiv e to scale up to industrial dimensions. Alternative methods are direct current (DC) or medium frequency (mf) plasma excitation which are eas ier and cheaper to scale up. The deposition of DLC coatings by bipolar -pulsed direct current PACVD (bp DC PACVD) will be discussed. The expe riments were carried out in a commercially available plasma nitriding plant. Adhesion was improved by an intermediate Si-C:H layer using tet ramethylsilane (Si(CH3)(4)) as a precursor. Methane (CH4) was used for depositing the DLC films. The mechanical properties of the films such as hardness, Young's modulus, and wear resistance were studied as a f unction of the process parameters such as bias current, pressure and m ethane flow and could be correlated to the reduced parameter J/p(0.5). The properties thus obtained are comparable with those by rf PACVD. ( C) 1998 Elsevier Science S.A.