We demonstrate a new method for thermal analysis of nanogram quantitie
s of material using a micromechanical thermogravimetric technique. The
cantilever-type device uses an integrated piezoresistor to sense bend
ing and simultaneously to ramp the temperature and control temperature
cycles. It has a mass resolution in the picogram range. A quantitativ
e analysis of the dehydration of copper-sulfate-pentahydrate (CuSO4. 5
H(2)O) is presented. The technique outperforms current thermogravimetr
ic approaches by five orders of magnitude. (C) 1998 Elsevier Science B
.V. All rights reserved.