T. Schenkel et al., ABLATION OF GAAS BY INTENSE, ULTRAFAST ELECTRONIC EXCITATION FROM HIGHLY-CHARGED IONS, Physical review letters, 81(12), 1998, pp. 2590-2593
We have measured total ablation rates and secondary ion yields from un
doped GaAs(100) interacting with slow (v = 6.6 x 10(5) m/s), very high
ly charged ions. Ablation rates increase strongly as a function of pro
jectile charge. Some 1400 target atoms are removed when a single Th70 ion deposits a potential energy of 152.6 keV within a few femtosecond
s into a nanometer-sized target volume. We discuss models for ablation
of semiconductors by intense, ultrafast electronic excitation. [S0031
-9007(98)07165-8].