STRUCTURAL AND OPTICAL-PROPERTIES OF LINBO3 FILMS GROWN BY PULSED-LASER DEPOSITION WITH A SHADOW MASK

High-quality LiSbO3 thin films were grown by pulsed laser deposition ( PLD) with a shadow mask. Epitaxial and twin-free films were obtained u sing a single crystal target without a post-annealing process. The fil m had a very smooth surface without the particulate problem which is c ommon in films grown by conventional PLD. The root-mean-square surface roughness was only 3.6 nm. and optical propagation loss was as low as 2 dB/cm.