EFFECTS OF MICROSTRUCTURE ON OPTICAL-PROPERTIES OF GE2SB2TE5 THIN-FILMS

The effects of thin film microstructure on the optical properties of G e2Sb2Te5 recording medium and their wavelength dependence were investi gated. The microstructure of thin films was modified by changing sputt ering Ar gas pressure during sample preparation. The variations in mic rostructure and film density were examined for samples prepared at var ious Ar gas pressures. The optical properties were dependent on the sp uttering gas pressure and could be correlated with the film microstruc ture.